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Subsurface damage in precision ground ULE® and Zerodur® surfaces

By Xavier Tonnellier, Paul Morantz, Paul Shore, A. Baldwin, R. Evans and D. D. Walker


The total process cycle time for large ULE®and Zerodur®optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE®and Zerodur®surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamic

Publisher: Optical Society of America (OSA)
Year: 2007
DOI identifier: 10.1364/OE.15.012197
OAI identifier:
Provided by: Cranfield CERES

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