Micro-electro-mechanical system design synthesis and optimisation by the means of genetic algorithms

Abstract

Micro{Electro{Mechanical Systems (MEMSs) are microscopic (1 to 100 m in size) electro{mechanical systems that are widely used in a variety of commercial applications owing to their small size, energy consumption and, in some cases, high precision. The conventional approaches to design optimisation of MEMS is complex, time consuming and requires a multidisciplinary team with considerable expertise. Hence, exploring the utility of other unconventional paradigms becomes desirable. This thesis focuses on the MEMS design synthesis and optimisation by means of evolutionary algorithms. Con/d