Thickness mode piezoelectric micro-electromechanical system (MEMS) ultrasound
transducers, operating in the 50–75 MHz range, have been fabricated using a
composite sol gel technique in combination with wet etching. The composite sol
gel technique involves producing a PZT powder/sol composite slurry, which when
spun down yields films a few micrometers thick. Repeated layering, and
infiltration, has been used to produce PZT films between 20 and 40 μm thick. Due
to the low firing temperature (<720°C) it has also been possible to
integrate these PZT films with a micro-machined silicon support wafer. These PZT
thick films have been structured using a wet etching technique to create free
standing pillars that have been shown to resonate in thickness mode in the
frequency range of 50–75 MHz. Examples of these structures and their resonant
behaviour are pre
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