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New Advances in Forming Functional Ceramics for Micro Devices

By Robert A. Dorey, Sophie A. Rocks, Florent Dauchy and A. Navarro

Abstract

Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require the development of new processing techniques. Potential solutions to these challenges based on low temperature processing of functional ceramics, selective chemical patterning, and micro-moulding are presented to show that it is possible to create complex functional ceramic structures which incorporate non-ceramic conducting and support structures. The capabilities of both techniques are compared and the relative advantages of each explored

Topics: PZT, MEMS, microsystems
Year: 2006
DOI identifier: 10.4028/www.scientific.net
OAI identifier: oai:dspace.lib.cranfield.ac.uk:1826/1777
Provided by: Cranfield CERES
Journal:

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