Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity r , dielectric loss tan , pyroelectric coefficient p, and thermal detection figure of merit F d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to producing high quality PST thin films
To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.