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Comparative Studies of PST Thin Films as Prepared by Sol-Gel, LDCVD and Sputtering Techniques

By Zhaorong Huang, P. P. Donohue, Qi Zhang, D. Williams, C. J. Anthony, M. A. Todd and Roger W. Whatmore


Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity r , dielectric loss tan , pyroelectric coefficient p, and thermal detection figure of merit F d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to producing high quality PST thin films

Topics: Pst, Thin Films, Sol-gel, Sputtering, Liquid Delivery Cvd
Publisher: Taylor and Francis
Year: 2002
DOI identifier: 10.1080/10584580215349
OAI identifier:
Provided by: Cranfield CERES

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