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Novel design and characterisation of SOICMOS micro-hotplates for high temperature gas sensors

By Prasanta K. Guha, Syed Z. Ali, C. C. C. Lee, Florin Udrea, W. I. Milne, T. Iwaki, James A. Covington and J. W. Gardner

Abstract

This paper describes the design and characterisation of a new generation of fully CMOS compatible novel micro-hotplates for high temperature gas sensors. The micro-hotplates employ advanced MOSFET heaters embedded in an Sol membrane. The heaters can operate at a ground-breaking high temperature of 550 degrees C for an ultra-low power consumption of 16 mW (continuous operation) and have a thermal rise time of below 10 ms. A large number of devices have been characterised over a batch of wafers and they show excellent reproducibility and reliability. The yield of the micro-hotplates after deep RIE back-etching was close to 90% while the residual stress was found to be minimal, resulting in fiat and stable membranes. Electronic circuits for drive and readout have also been designed and integrated with the micro-hotplates to create a smart gas sensor

Topics: QD
Publisher: Elsevier Science
Year: 2007
DOI identifier: 10.1016/j.snb.2007.07.047
OAI identifier: oai:wrap.warwick.ac.uk:31183
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