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Improved anti-stiction coating of SU-8 molds

By Jacob Moresco Lange, Casper Hyttel Clausen and Winnie Edith Svendsen
Publisher: 'Elsevier BV'
Year: 2010
DOI identifier: 10.1016/j.snb.2010.01.020
OAI identifier: oai:pure.atira.dk:publications/7845bd8e-5f88-48c5-aa0b-332b8205291c
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