Improved anti-stiction coating of SU-8 molds

By Jacob Moresco Lange, Casper Hyttel Clausen and Winnie Edith Svendsen

Publisher: 'Elsevier BV'

Year: 2010

DOI identifier: 10.1016/j.snb.2010.01.020

OAI identifier: oai:pure.atira.dk:publications/7845bd8e-5f88-48c5-aa0b-332b8205291c

Provided by: Online Research Database In Technology

Download PDF:
_{Sorry, we are unable to provide the full text but you may find it at the
following location(s):}

https://doi.org/10.1016/j.snb.... (external link)

https://orbit.dtu.dk/en/public... (external link)