Article thumbnail

A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

By Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, Daniel Kjær and Peter Folmer Nielsen
Year: 2007
OAI identifier:
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • (external link)
  • Suggested articles

    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.