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A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

By Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, Daniel Kjær and Peter Folmer Nielsen
Year: 2007
OAI identifier: oai:pure.atira.dk:publications/6a318ca2-a5fc-42db-a66c-78c84047eb92
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