A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

By Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, Daniel Kjær and Peter Folmer Nielsen

Year: 2007

OAI identifier: oai:pure.atira.dk:publications/6a318ca2-a5fc-42db-a66c-78c84047eb92

Provided by: Online Research Database In Technology

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