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DRILLING OF FINE APERTURES IN THIN METALLIC FOILS USING A FOCUSED ION-BEAM

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Abstract

An indium focused ion beam has been used to sputter- drill holes through foils of copper (5 mum thick) and aluminium (5-25 mum thick). The drilling process Is monitored by observing the sample absorbed current and/or the transmitted current collected by a Faraday cup placed underneath the foil. The size of the exit aperture can be controlled by blanking the beam at a pre-determined time following penetration. Copper is penetrated about twice as quickly as aluminium. Exit apertures having areas as small as 0.054 mum2, corresponding to about 1 s of post-penetration drilling and to a drop of about 30 pA in absorbed current, have been fabricated in 5 mum thick aluminium foil. Penetration times increase rapidly for aluminium foils thicker than 10 mum

Topics: TA, QC
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
OAI identifier: oai:wrap.warwick.ac.uk:21410
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