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Theoretical aspects of surface nanometrology

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Abstract

Miniaturization has forced surface texture, form and size together making independent assessment difficult. This paper indicates the way that texture and form change character at the nano level and show how Markov and fractal mechanisms occur in manufacture. Some ways in which surface performance and measurement change with scale of size are also explored

Topics: TL, QD
Publisher: HARBIN INSTITUTE TECHNOLOGY PUBLISHERS
OAI identifier: oai:wrap.warwick.ac.uk:8996
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