A compact and fabrication-tolerant polarization beam splitter (PBS) based on the horizontal triple-slot waveguides is proposed and optimized by using the rigorous H-field-based full-vectorial finite element method and the least-squares boundary residual method. It can be noted from the simulation results that a fabrication-tolerant PBS with a compact length of 33 μm can be yielded based on the horizontal triple-slot waveguides. The polarization extinction ratios are −21.8 and −20.3 dB at 1.55 μm wavelength for the quasi-TE and quasi-TM modes, respectively. The 1 dB bandwidth is 100 nm for both the polarizations. The fabrication tolerances are also thoroughly calculated for the proposed PBS
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