Location of Repository

Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing

By Vittorio M. N. Passaro and Mario La Notte

Abstract

Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%

Topics: slot waveguides, homogeneous optical sensing, slot couplers, Technology (General), T1-995, Technology, T, DOAJ:Technology (General), DOAJ:Technology and Engineering, Analytical chemistry, QD71-142, Chemistry, QD1-999, Science, Q, DOAJ:Analytical Chemistry, DOAJ:Chemistry, Chemical technology, TP1-1185
Publisher: MDPI AG
Year: 2012
DOI identifier: 10.3390/s120302436
OAI identifier: oai:doaj.org/article:145636064a8848f193ab93cbf3a21b9f
Journal:
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • https://doaj.org/toc/1424-8220 (external link)
  • http://www.mdpi.com/1424-8220/... (external link)
  • https://doaj.org/article/14563... (external link)
  • Suggested articles


    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.