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A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling

By Gozen B and Ozdoganlar O


<p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.</p

Topics: Nanomilling, AFM probe, Nano-manufacturing, Nano-machining, Chemistry, QD1-999, Science, Q, DOAJ:Chemistry (General), DOAJ:Chemistry, Materials of engineering and construction. Mechanics of materials, TA401-492
Publisher: Springer
Year: 2010
DOI identifier: 10.1007/s11671-010-9653-7
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