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MULTIVARIATE STATISTICAL QUALITY CONTROL. APPLICATION TO IC MANUFACTURING

By ΧΑΡΙΛΑΟΣ ΚΑΤΩΠΟΔΗΣ

Abstract

AN ADVANCED MULTIVARIATE STATISTICAL ANALYSIS SYSTEM (MUST-MULTIVARIATE STATISTICAL QUALITY CONTROL IN IC MANUFACTURING) HAS BEEN DESIGNED AND DEVELOPED TO SUPPORT COST-EFFECTIVE QUALITY CONTROL IN IC FABRICATION. THE MUST SYSTEM IS COMPOSED OF TWO SUBSYSTEMS: VARGROUP (VARIABLE GROUPING) SUBSYSTEM, WHERE, VARIABLE CLUSTER ANALYSIS IS USED ON HISTORICAL MEASUREMENTS IN ORDER TO REDUCE DIMENSIONALITY AND TO PROVIDE A SET OF CLUSTERS, SMALLER THAN THE ORIGINAL SET OFVARIABLES BUT STILL CAPABLE TO EXPLAIN SUFFICIENTLY THE DATA VARIABILITY. MVCC (MULTI VARIATE CONTROL CHARTS) SUBSYSTEM IS PERFORMING ON REAL DATA AND CONSTRUCTS ONE CONTROL CHART FOR EACH CLUSTER PRODUCED BY VARGROUP SUBSYSTEM. THE FITNESS OF THE VARIOUS TYPES OF THE HOTELLING'S T2 MULTIVARIATE CONTROL CHART IN THE INTEGRATED CIRCUITS (ICS) FABRICATION IS EXAMINED AND AN APPROPRIATE (TO THIS PARTICULAR MANUFACTURING PROCESS WITH MANY SOURCES OF VARIABILITY) CONTROL PROCEDURE IS INTRODUCED. OUT OF CONTROL SIGNALS INDICATED BY T2 CONTROL CHARTS ARE EXPLAINED BY A NEW ACCURATE METHOD; MOCA (MULTIVARIATE OUT OF CONTROLANALYZER). THIS METHOD IS APPLICABLE FOR BOTH CASES OF KNOWN AND UNKNOWN STANDARD VALUES, AND IS BASED ON THE GRAPHICAL OBSERVATION OF THE MULTIDIMENSIONALELLIPSOID CONTROL CHART. ITS PERFORMANCE IS SUPERIOR TO THE EXISTING METHODS.REAL TEST DATA TAKEN ON THE WAFER'S FIVE TEST STRUCTURES ARE USED TO ILLUSTRATE THE THEORETICAL ASPECTS AND TO EVALUATE THE SYSTEM.

Topics: Cluster analysis, HOTELLING'S T2, Integrated circuits, MULTIVARIATE CONTROL CHARTS, RATIONAL SUBGROUPING, Statistical quality control, Ανάλυση ομαδοποίησης, Ολοκληρωμένα κυκλώματα, ΟΡΘΟΛΟΓΙΚΗ ΥΠΟΟΜΑΔΟΠΟΙΗΣΗ, ΠΟΛΥΜΕΤΑΒΛΗΤΑ ΔΙΑΓΡΑΜΜΑΤΑ ΕΛΕΓΧΟΥ, ΣΤΑΤΙΣΤΙΚΟΣ ΠΟΙΟΤΙΚΟΣ ΕΛΕΓΧΟΣ
Publisher: National Technical University of Athens (NTUA)
Year: 1995
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