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Sensing properties of e-beam evaporated nanostructured pure and iron-doped tungsten oxide thin films

By M. Ahsan, T. Tesfamichael, A. Ponzoni and G. Faglia


Gas sensing properties of nanostructured pure and iron-doped WO3 thin films are discussed. Electron beam evaporation technique has been used to obtain nanostructured thin films of WO3 and WO3:Fe with small grain size and porosity. Atomic force microscopy has been employed to study the microstructure. High sensitivity of both films towards NO2 is observed. Doping of the tungsten oxide film with Fe decreased the material resistance by a factor of about 30 when exposed to 5 ppm NO2. The high sensitivity is attributed to an improved microstructure of the films obtained through e-beam evaporation technique, and subsequent annealing at 300oC for 1 hour

Topics: 020400 CONDENSED MATTER PHYSICS, 091200 MATERIALS ENGINEERING, 100700 NANOTECHNOLOGY, Nanostructure, tungsten trioxide, thin films, gas sensors, microstructure
Publisher: American Scientific Publishers
Year: 2011
DOI identifier: 10.1166/sl.2011.1610
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