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SOI MICROMACHINED 5-AXIS MOTION SENSOR USING RESONANT ELECTROSTATIC DRIVE AND NON-RESONANT CAPACITIVE DETECTION MODE

By Takashi Mineta, See Profile, Yoshiyuki Watanabe, Toshiaki Mitsui, Takashi Mineta, Yoshiyuki Matsu and Kazuhiro Okada

Abstract

SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mod

Topics: 5-axis motion, 3-axis acceleration, 2-axis angular rate, resonant drive
Year: 2016
OAI identifier: oai:CiteSeerX.psu:10.1.1.949.1745
Provided by: CiteSeerX
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