Wireless RFID-Based Thermal Convection Type Inclinometer and Monitor System Design *


Abstract- This research proposes a wireless RFID-based thermal convection type inclinometer design, and relates more particularly to manufacture it on a flexible substrate. The key point is to integrate both an inclinometer and a wireless RFID antenna on the same substrate, such that the inclinometer is very convenient for usage. Both xenon and carbon dioxide gases were filled in the chamber, and the inner chamber shape was changed from the traditional rectangular to hemi-cylindrical one. The results by using floating and non-floating structures were studied firstly; note that the sensitivity curves by applying the non-floating structure were more linear, so it applied in this paper. To increase the sensitivity, the thermisters were stacked on some materials such as alumina nitride, copper and silicon. Three kinds of stacking height were studied, such as 1, 1.5 and 2mm. One can see the combinations of AlN/Xenon are always better. Besides, the xenon gas would not produce oxidization effect to the heater, it is more reliable. If the largest sensitivity is the key consideration, then H2=1.5mm is the best choice (0.4°C/Degree), but the linear operating range is 45°. However, If the largest linear operating range is the requirement, then H2=2mm is the best one (75°), but the sensitivity is 0.173°C/Degree. Index Terms- wireless RFID-based; thermal convection type; inclinometer; flexible substrate. 1

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