Microcantilever array Sensors


In this paper, thermodynamic characterization of the well known MOF HKUST-1 has been conducted using Quartz Crystal Microbalance (QCM) with the analyte gas CO2 for a wide range of temperatures and pressures. The thermal characterization of HKUST-1 was performed by measuring the shift in resonant frequency of the crystal, to calculate the adsorption isotherms. The adsorption isotherms were then fit to Langmuir isotherms to obtain the thermodynamic parameters. HKUST-1 was then successfully applied to microcantilever for sensor application. N-doped piezoresistive microcantilever array sensors were fabricated using microfabrication technologies. The substantial resistance changes with MOFs exhibited a strong and completely reversible response for adsorption and desorption

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