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This is an update request for the document Two new methods for simulating photolithography development in 3D
by J. Helmsen, P. Colella, M. Dorr and E.G. Puckett
Your paper was deposited in MUCC (Crossref)
and appears online at https://digital.library.unt.edu/ark:/67531/metadc696199/m2/1/high_res_d/514411.pdf
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