This is an update request for the document Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s : towards applications as EUV photoresists
by Kirsten Lawrie, Idriss Blakey, James Blinco, Roel Gronheid, Kevin Jack, Ivan Pollentier, Michael J. Leeson, Todd R. Younkin and Andrew K. Whittaker
Your paper was deposited in Queensland University of Technology ePrints Archive
and appears online at
Before we are able to make any updates or deletions, you must
ensure that the original record at this location is updated/removed.